We offer world-class production capacity for tungsten hexafluoride which is used to mold metal wiring. We have also developed a commercial silicon gases for low-dielectric insulating layers that can accommodate the ongoing miniaturization and integration in semiconductors.
| Product Name | Purity | Packaging | Applications |
|---|---|---|---|
| WF6 | 99.9995% or more | Cylinder (3.4L, 10L, 40L) Material: Stainless steel |
CVD WSix, W materials |
| SiF4 | 99.999% or more | Cylinder (10L, 47L) Material: Manganese steel |
Optical fiber doping substances, Low dielectric insulation layer for Semiconductors |
| SiH(CH3)3 (Trimethylsilane) |
99.995% or more | Cylinder (10L, 47L) Material: Manganese steel |
SiC, SiOC, SiO2, SiN membrane materials |
| Si(CH3)4 (Tetramethylsilane) |
99.995% or more | Cylinder Material: Stainless steel |
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