| Product Name | Purity | Packaging | Applications |
|---|---|---|---|
| 5%,10% Diluted fluorine (5%,10%F2/ He) (5%,10%F2/ Ne) (5%,10%F2/ Ar) |
F2 : 99.9% or more He : 99.995% or more Ne : 99.9% or more Ar : 99.999% or more |
Cylinder (10L, 47L) Material: Manganese steel | For excimer lasers |
| Product Name | State at room temperature | Boiling point [°C] | CAS No. | Applications |
|---|---|---|---|---|
| GeF4 | Gaseous | -19°C | 7783-58-6 | Implantation material, SiGe material |
| XeF2 | Solid | 114°C | 13709-36-9 | Etching gas for MEMS |
| IrF6 | Solid | 53°C | 7783-75-7 | Electrode material |
For Enquires
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TEL: +81-3-3259-7267
