Message from the President.
We have developed commercial tungsten hexafluoride which is used to mold metal wiring. We have also developed a commercial silicon gases for low-dielectric insulating layers that can accommodate the ongoing miniaturization and integration in semiconductors.
*Contact Central Glass directly for more information.
WF6
These are semiconductor specialty gases used in the formation of contact plugs and silicide.
| Purity | 99.9995% or more |
|---|
Applications
- CVD WSix, W Materials
SiH(CH3)3 (Trimethylsilane)
These are silicon gases for low dielectric constant interlayer insulating films that respond to advances in semiconductor device miniaturization and increasing integration.
| Purity | 99.9995% or more |
|---|
Applications
- SiC, SiOC, SiO2, SiN membrane materials
For Product Inquiries
Links
- Research and Development
- View our R&D activities.
