Products

Pattern Keeper™ (Pattern Collapse Prevention Agent)

A chemical solution with high water repellency created by our proprietary technology. Prevents pattern collapse by providing the surface of a semiconductor pattern with this same characteristic of water repellence, which is a major problem during the drying process after wet cleaning.

Single-wafer type

In single-wafer cleaning, this chemical solution exhibits high water repellency in a short processing time.

Batch-type

In batch-type (vapor type) cleaning, this chemical solution provides high uniformity in batch processing in a large chamber.

Electronic Materials Related Products

Electronic Materials Related Research and Development

Contact

Online inquiries

Telephone inquiries

Electronic Materials Sales Department
Business hours: 9:00 a.m. - 5:30 p.m.

※Except Saturdays, Sundays, public holidays, August 15, and seasonal holiday periods.