Other Fluorine Products

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5%,10% Diluted fluorine(5%,10%F2/ He)(5%,10%F2/ Ne)(5%,10%F2/ Ar)

Used for excimer lasers

Purity F2:99.9% or more
He:99.995% or more
Ne:99.9% or more
Ar:99.999% or more
Packaging Cylinder (10L, 47L) Material: Manganese steel


  • For excimer laysers


Used as Etching gas for MEMS

State at room temperature Solid
Boiling point [℃] 114℃
CAS No. 13709-36-9


  • Etching gas for MEMS

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